Ergoscrub.pmd

D e s c r i p t i o n - E r g o S C R U B™
UltraSOLV® ScrubPAD,
ErgoSCRUB™
ErgoSCRUB™ was designed to provide technician with a soft ergonomically correct scrubbing tool for Implant tools, and ScrubDISKTM
ceramic domes, Novellus heater blocks, and large vacuum chambers. ErgoSCRUB™ is also available in firm models to allow for quick and easy scrubbing on flat surfaces.
D e s c r i p t i o n - S c r u b P A D
cleaning critical surfaces
UltraSOLV® ScrubPADs are patented scrubbing tools for use in PM procedures on process equipment in semiconductor, A d v a n t a g e s
flat panel display, optical component and hard disk drive industries. The availability of various sized diamond, silicon carbide and aluminum oxide abrasives allow for safe and efficient scrubbing of the most difficult to clean process cham- Flexible enough to clean spherical surfaces, such as domes. (FT900/FT901) bers. UltraSOLV® ScrubPADs, used in conjunction with UltraSOLV® Sponges, Wipers, and Swabs, reduce cleaning times,pump down times and contamination levels for critical process tools.
Allows for uniform scrubbing action in order to minimize tool wear, such as dishing to heater blocks.(FT950/FT951) Enables faster cleaning of large tool surfaces.
A d v a n t a g e s
Available as a reusable or disposable tool with a variety of Diamond or Silicone Carbide ScrubPADs.
Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear.
E r g o S C R U BTM A p p l i c a t i o n s
The fiber-free construction of ScrubPADs greatly reduces particle levels in cleaned tools.
Technology
ErgoSCRUB™ Part Number
By using washed abrasives, harmful ionic residues are minimized.
Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures.
Novellus Concept One and Two heater blocks Shield and component scrubbing for AMAT, TEL and Anelva Tools Enables the elimination of H2O2 from PMs, which greatly reduces recovery times.
AMAT, Axcelis, or Varian, source, beamline, MRS components and process chambers.
S c r u b P A D C l e a n l i n e s s
AMAT Reflexion and Mirra Mesa Cross and Shield Cleaning E r g o S C R U BTM P r o d u c t s
ErgoSCRUBTM
FT900 - Soft Handle - disposable : This model is meant for easy scrubbing of domes and other circular surfaces.
HT901 - Soft Handle with Loop Backing = Reusable FT950 - Hard Handle: This model is meant for scrubbing flat surfaces.
FT951 - Hard Handle with Loop Backing = Reusable ScrubDISKsTM
Available ranging from 140 to 1350 grit Diamond, PSA (Pressure Sensitive Adhesive) Available rangning from 180 to 1350 grit Diamond, Loop (For Easy Replacement) Please check out the Products page of our website to find out ordering information for ScrubDISKsTM.
www.foamexasiawcc.com
1210 Keystone Way, Suite A, Vista, CA 92081 USA 760.599.7160 fax 760.599.7322
133 Moo 1, Hi-Tech Industrial Estate, Tambol Baanpo, Amphur Bangpa-In, Ayutthaya Province, 13160 Thailand 66.3531.4000
S c r u b P A D A p p l i c a t i o n C h a r t
S c r u b P A D A p p l i c a t i o n C h a r t
Tool Category
Tool Type
ScrubPAD Part No.
Comments
Tool Category
Tool Type
ScrubPAD Part No.
Comments
Can replace HT4536D-10 for tools that have lighter build-up To remove residue from source chamber, liners For view port, pump port, and slit valve cleaning For chamber wall, lid and sealing surface cleaning HT4510S-10 or HT4528D-10 or To remove extremely hard residue from HT4514DC3-1* or HT4518DC3-1* beam line and MRS components To remove residue from source chamber, liners For cleaning lid and sealing surfaces and to polish chamber wall To remove process stains from chamber wall and metal surfaces To remove extremely hard residue from beam line Finishing pad for chamber surface and gas ring *For use in conjunction with ErgoSCRUB™ Hand Tool To remove hardened residue from ceramic domes in HT4522DC3-1 or HT4528DC3-1 less than 2 hours Novellus SPEED, SEQUEL& HDP HT4528D-10 or ScrubPAD Family of Products
Allows 2 hour cleaning time for heater block Novellus Concept 1 + 2 &PECVD & SPEED Enables cleaning of ceramic parts and 1 hour clean of Enables 30 min. cleaning of heater block dry and 45 min.
Allows for 1 hour removal of Nitride-based residue Allows for quick removal of process residue from hard anodized upper chamber surfaces either dry or To dry scrub chalk-like residue in < 1½ hours To remove process residue from hard anodized upper To remove process residue from soft anodized (SA HT4512P-10 or HT4513PDS-10 Dry scrub to remove deposition from O-ring grooves and sealing surface upper chamber lid as well as to smooth out any scratches To remove process build-up with light scrubbing action ErgoSCRUB™ and ScrubDISK™
To remove brownish or rainbow-like stain from upper, lower, pedestal To remove process build-up with light scrubbing action To remove blue rainbow and brown residue build-up withlight scrubbing action To remove process build-up with light scrubbing action.
To remove process build-up with light scrubbing action.
Sensitive Adhesive for the disposable handle To remove residue from ceramic and aluminum components with DI ment of the ScrubDISKsTM, as pictured here.
To remove residue and smooth out rough finish of the ceramic ring with To remove residue from source chamber, liners, and components with Enable quick removal of hardened residue from sources, source To polish source chamber, liners, and component. Also to clean source To remove residue from source chamber, liners f the Tool Category or Type you are looking for is not listed, please visit the Products page at www.foamexasiawcc.com for
more information or call 866.922.7160 ext. 341 to have a sales engineer get in contact with you.

Source: http://www.greenspec.co.kr/g_v1/semi/ergoscrub.pdf